Erik Jan Marinissen - IMEC, Belgium
3D Test and Design-for-Test Challenges and Solutions
Abstract:
Three-dimensional stacking of ICs has kept folks in both technology and design research busy for several years. This research has advanced to the point that virtually all semiconductor companies have now released or announced 3D-SIC products or are developing such products in stealth mode. No wonder, because 3D-SICs hold the promise of heterogeneous integration, inter-die connections with increased performance at lower power dissipation, and increased yield and hence decreased product cost. However, all these benefits can only materialize if 3D-SICs can be properly tested for manufacturing defects. In this presentation, I will review the main challenges related to test and design-for-test (DfT), and present solutions that we at imec, together with partners, have worked on in the recent past. The talk will cover (1) a generic 3D die stack model and associated tests, (2) probe access from external test equipment to dies or die stacks during the various steps of the stack assembly flow, (3) 3D-DfT architectures that provide test access internal to the die stack, and (4) cost modeling to determine optimized, cost-effective test flows. As founder and first chair of IEEE Std 1838-2019, I will of course also address this new 3D-DfT standard that was released in March 2020.
Short Bio:
Erik Jan Marinissen is scientific director at imec in Leuven, Belgium, the world-leading independent R&D center in nanoelectronics technology. His research on IC test and design-for-test covers topics as diverse as TSV-based 3D-stacked ICs, sub-10nm CMOS technology, silicon photonics, and STT-MRAMs. In addition, he is visiting researcher at Eindhoven University of Technology (TU/e), the Netherlands. Previously, he worked at NXP Semiconductors and Philips Research Laboratories in Eindhoven, Nijmegen, and Sunnyvale. Marinissen holds an MSc degree in Computing Science (1990) and a PDEng degree in Software Technology (1992), both from TU/e. He is (co-)author of 275+ journal and conference papers and (co-)inventor of eighteen US/EP patents. Marinissen served as Editor-in-Chief of IEEE Std 1500TM-2005 on embedded core test access and as Founder and Chair (currently Vice-Chair) of IEEE Std 1838TM-2019 on 3D test access. Marinissen is founder of the workshops ‘Diagnostic Services in Network-on-Chips’ (2007-2011), ‘3D Integration Workshop’ (2009-2013), and the IEEE International Workshop on Testing Three-Dimensional Stacked ICs’ (2010-2015). He has been Program Chair of DDECS 2002, ETS 2006, 3D-TEST 2009-15, and DATE 2013, and General Chair of ETW 2003, DSNOC 2007-08, 3DIW 2009-10, and serves on numerous conference committees, including ATS, DATE, ETS, ITC, ITC-Asia, and VTS. He serves on the editorial boards of IEEE ‘Design & Test’ and Springer’s ‘Journal of Electronic Testing: Theory and Applications’.
On its 50th anniversary, the IEEE International Test Conference (ITC) announced Marinissen to be the most-cited author of ITC papers over the 25-year period 1995-2019. Marinissen is (co-)recipient of the Most Significant Paper Awards at ITC 2008 and ITC 2010, Best Paper Awards at the Chrysler-Delco-Ford Automotive Electronics Reliability Workshop 1995 and the IEEE International Board Test Workshop (BTW) 2002, the Most Inspirational Presentation Award at the Semiconductor Wafer Test Workshop (SWTW) 2013, the HiPEAC Technology Transfer Award 2015, the SEMI Best ATE Paper Award 2016, the National Instruments’ Engineering Impact Award 2017, the IEEE Standards Association’s Emerging Technology Award 2017, Best Paper Award at the International Wafer-Level Packaging Conference (IWLPC) 2018, and the Best Design-Track Paper Award at the Design, Automation, and Test in Europe (DATE) Conference 2020.
Marinissen is Fellow of IEEE, Golden Core Member of IEEE Computer Society, and serves as elected member of the IEEE Computer Society’s Board of Governors for the term 2019-2021. Marinissen has presented full- and half-day tutorials on Core- Based SOC Test, 3D-SIC Test, and Improving ATPG Test Quality at 3DIC, 3D-ASIP, DATE, ETS/ETW, ITC, ITC-Asia, and VTS, as well as numerous multi-day in-house company courses. During the span of his career, Marinissen has supervised 45+ international MSc and PhD students. Marinissen is member of the Patient Researchers Working Group of the Dutch Parkinson’s Disease Association.
Session Chair: Tiago Balen, UFRGS, Brazil